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Research Output 1994 2019

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Conference article
2005

Fabrication and characterization of vertical travel linear microactuator

Toda, R. & Yang, E-H., Jul 21 2005, In : Progress in Biomedical Optics and Imaging - Proceedings of SPIE. 5717, p. 14-20 7 p., 02.

Research output: Contribution to journalConference article

Microactuators
Piezoelectric actuators
Silicon
actuation
travel
2004

Fabrication and characterization of vertical travel linear microactuator

Toda, R. & Yang, E-H., Jan 1 2004, In : American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. p. 159-163 5 p., IMECE2004-59911.

Research output: Contribution to journalConference article

Microactuators
Piezoelectric actuators
Fabrication
Silicon
Electric potential
2003
2 Citations (Scopus)

Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Yang, E-H., Shcheglov, K. & Trolier-McKinstry, S., Jan 1 2003, In : Proceedings of SPIE - The International Society for Optical Engineering. 4985, p. 271-278 8 p.

Research output: Contribution to journalConference article

Deformable Mirror
deformable mirrors
strokes
Stroke
Fabrication
6 Citations (Scopus)
Microactuator
Microactuators
Space Telescope
Space telescopes
Silicon
16 Citations (Scopus)

MOEMS spatial light modulator development at the center for adaptive optics

Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Hehnbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y. A., Sadoulet, B., Solgaard, O. & Yang, E. H., Jan 1 2003, In : Proceedings of SPIE - The International Society for Optical Engineering. 4983, p. 227-234 8 p.

Research output: Contribution to journalConference article

Spatial Light Modulator
Adaptive optics
Adaptive Optics
light modulators
adaptive optics
9 Citations (Scopus)

MOEMS spatial light modulator development at the Center for adaptive optics

Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Helmbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y. A., Sadoulet, B., Solgaard, O. & Yang, E. H., Jan 1 2003, In : Proceedings of SPIE - The International Society for Optical Engineering. 4985, p. 172-179 8 p.

Rutgers, The State University

Research output: Contribution to journalConference article

Spatial Light Modulator
Adaptive optics
Adaptive Optics
light modulators
adaptive optics
2002
5 Citations (Scopus)

A piezoelectric unimorph deformable mirror concept by wafer transfer for ultra large space telescopes

Yang, E-H. & Shcheglov, K., Dec 1 2002, In : Proceedings of SPIE - The International Society for Optical Engineering. 4839, 2, p. 703-710 8 p.

Research output: Contribution to journalConference article

Space Telescope
Space telescopes
Deformable Mirror
deformable mirrors
Hubble Space Telescope
2000
Electrostatic actuators
Deformable Mirror
deformable mirrors
Micro-electro-mechanical Systems
Electrostatics