A novel scheduling approach to dual-arm cluster tools with wafer revisiting

Nai Qi Wu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.

Original languageEnglish (US)
Title of host publicationProceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
Pages1213-1218
Number of pages6
DOIs
StatePublished - Dec 1 2012
Event2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012 - Seoul, Korea, Republic of
Duration: Oct 14 2012Oct 17 2012

Publication series

NameConference Proceedings - IEEE International Conference on Systems, Man and Cybernetics

Other

Other2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
CountryKorea, Republic of
CitySeoul
Period10/14/1210/17/12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Human-Computer Interaction
  • Control and Systems Engineering

Keywords

  • Petri nets
  • cluster tool
  • scheduling
  • semiconductor manufacturing

Cite this

Wu, N. Q., & Zhou, M. (2012). A novel scheduling approach to dual-arm cluster tools with wafer revisiting. In Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012 (pp. 1213-1218). [6377897] (Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics). https://doi.org/10.1109/ICSMC.2012.6377897