Abstract
We report on an innovative isothermal post-growth/crystallization process that utilizes ultraviolet (UV)-photon irradiation. We fabricated Ba1-xSrxTiO3 (BST) thin films using metalorganic solution deposition (MOSD) and UV-photon irradiation isothermal treatment via two protocols: in situ crystallized UV-photon irradiated films, and post-crystallization UV-photon irradiated films. Isothermal UV-photon irradiation treatment improves the structural quality of the BST films, and the irradiated films possessed lattice parameters close to the bulk values, which is evidence for a reduction in oxygen vacancies. MOSD fabricated BST films crystallized via conventionally furnace annealing and subsequently exposed to UV-photon irradiation possessed improved structural, dielectric, and electrical quality.
| Original language | American English |
|---|---|
| Pages (from-to) | 34-46 |
| Number of pages | 13 |
| Journal | Integrated Ferroelectrics |
| Volume | 126 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2011 |
| Externally published | Yes |
| Event | Symposium on Ferroelectric and Piezoelectric Materials, Devices, and Applications - 19th International Materials Research Congress, IMRC 2010 - Cancun, Mexico Duration: Aug 15 2010 → Aug 19 2010 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Keywords
- BST
- UV-photon irradiation
- dielectric loss
- material property balance
- microwave devices
- phase shifter
- thin film processing