Abstract
Industrial robots can now "see" with the aid of an imaging device and its around 65,000 picture elements. This enables the robot to identify and inspect different objects and then accurately determine their position and orientation. The integration of the image processing system in the robot is something unique on the market today and bring us closer to our realization of an intelligent robotic vision system for an industrial environment. This paper presents a prototype of such a system being developed by the authors for automatic wafer inspection. Speed and reliability performance are the key considerations in the design of the final robotic visual inspection system.
| Original language | American English |
|---|---|
| Pages | 270-275 |
| Number of pages | 6 |
| DOIs | |
| State | Published - 1988 |
| Externally published | Yes |
| Event | 1988 International Conference on Industrial Electronics: Robotics and Vision, IECON 1988 - Singapore, Singapore Duration: Oct 24 1988 → Oct 28 1988 |
Conference
| Conference | 1988 International Conference on Industrial Electronics: Robotics and Vision, IECON 1988 |
|---|---|
| Country/Territory | Singapore |
| City | Singapore |
| Period | 10/24/88 → 10/28/88 |
ASJC Scopus subject areas
- Computer Vision and Pattern Recognition
- Industrial and Manufacturing Engineering
- Control and Optimization
- Software
- Electrical and Electronic Engineering
- Artificial Intelligence
- Computer Graphics and Computer-Aided Design
- Computer Science Applications
Keywords
- Feature extraction
- Frames
- Image analysis
- Knowledge representation
- Registration
- Robotic vision
- Rule verification
- Rule-based die to database
- Segmentation
- Wafer inspection
Fingerprint
Dive into the research topics of 'An intelligent robotic vision system for wafer inspection in an industrial environment'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver