Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems

Joseph A. Turner, Roshanak Nilchiani, Joshua S. Wiehn

Research output: Contribution to conferencePaper

Abstract

Atomic force acoustic microscopy (AFAM) can be used to make quantitative images of surface stiffness with high resolution. The technique utilizes the dynamic response of the atomic force microscope (AFM) cantilever, specifically in terms of the higher-order cantilever modes. Motion of the specimen while in contact with the AFM tip induces vibrations in the cantilever. The dynamical properties of the cantilever change during scanning due to the variations of surface stiffness. Both stiff and compliant cantilevers may be used for stiffness imaging if the appropriate vibration mode is chosen. Experimental AFAM results on polysilicon for microelectromechanical systems (MEMS) are presented. The AFAM results provide stiffness information about the material microstructure that is not available from topography information alone. The technique provides in-situ stiffness information without damaging the MEMS.

Original languageEnglish (US)
Pages79-86
Number of pages8
StatePublished - Dec 1 2001
EventProceedings of the 7th ASME NDE Tropical Conference - 2001 - San Antonio, TX, United States
Duration: Apr 23 2001Apr 25 2001

Other

OtherProceedings of the 7th ASME NDE Tropical Conference - 2001
CountryUnited States
CitySan Antonio, TX
Period4/23/014/25/01

Fingerprint

MEMS
Stiffness
Microscopes
Polysilicon
Topography
Dynamic response
Acoustic Microscopy
Scanning
Imaging techniques
Microstructure

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Turner, J. A., Nilchiani, R., & Wiehn, J. S. (2001). Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems. 79-86. Paper presented at Proceedings of the 7th ASME NDE Tropical Conference - 2001, San Antonio, TX, United States.
Turner, Joseph A. ; Nilchiani, Roshanak ; Wiehn, Joshua S. / Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems. Paper presented at Proceedings of the 7th ASME NDE Tropical Conference - 2001, San Antonio, TX, United States.8 p.
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Turner, JA, Nilchiani, R & Wiehn, JS 2001, 'Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems' Paper presented at Proceedings of the 7th ASME NDE Tropical Conference - 2001, San Antonio, TX, United States, 4/23/01 - 4/25/01, pp. 79-86.

Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems. / Turner, Joseph A.; Nilchiani, Roshanak; Wiehn, Joshua S.

2001. 79-86 Paper presented at Proceedings of the 7th ASME NDE Tropical Conference - 2001, San Antonio, TX, United States.

Research output: Contribution to conferencePaper

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Turner JA, Nilchiani R, Wiehn JS. Atomic Force Acoustic Microscopy for Materials Characterization of Microelectromechanical Systems. 2001. Paper presented at Proceedings of the 7th ASME NDE Tropical Conference - 2001, San Antonio, TX, United States.