Characteristics of BAW Modes Harmonically Generated (f-2f-3f) in LiNO3 SAW Devices

Xiangnan Pang, Yook Kong Yong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The characteristics of nonlinear harmonic generation of bulk acoustic wave (BAW) modes in surface acoustic wave (SAW) devices were studied and presented. Specifically the BAW modes were nonlinearly generated (f-2f-3f) by the fundamental SAW mode in a 128° YX LiNO3 temperature compensated SAW (TC-SAW) resonator. These BAW modes interfered with the desired SAW mode of the TC-SAW resonator. The method and formulation of nonlinear frequency response of piezoelectric BAW and SAW was presented, and FEM was used to solve three sets of coupled nonlinear equations in the frequency domain. For SAW devices, nonlinearly excited BAW waves in 128° YX LiNO3 TC-SAW devices had been observed experimentally and reported [1]. We demonstrated our formulation/method for this nonlinear harmonic generation problem, and we obtained good, consistent simulation results. The 2nd harmonic (H2) generation was due to a nonlinearly excited bulk wave mode polarized and travelling along the thickness direction of substrate. The mode was almost normal to the top and bottom surfaces of substrate, forming a standing wave between top and bottom surfaces. Therefore, the substrate thickness, and bottom surface roughness had effects on the H2 response. The H3 response was due to a similar type of nonlinearly excited BAW wave.

Original languageEnglish (US)
Title of host publicationIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683057
DOIs
StatePublished - Apr 2019
Event2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019 - Orlando, United States
Duration: Apr 14 2019Apr 18 2019

Publication series

NameIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings

Conference

Conference2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019
CountryUnited States
CityOrlando
Period4/14/194/18/19

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications

Keywords

  • 128° YX LiNO3 TC-SAW resonator
  • amplitude-frequency effects
  • f-2f-3f frequency response
  • harmonic generation
  • nonlinear frequency response
  • nonlinear vibrations

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    Pang, X., & Yong, Y. K. (2019). Characteristics of BAW Modes Harmonically Generated (f-2f-3f) in LiNO3 SAW Devices. In IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings [8855990] (IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/FCS.2019.8855990