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Cyclic plasma treatment during ALD Hf1-xZrxO 2 deposition

  • M. N. Bhuyian
  • , D. Misra
  • , K. Tapily
  • , R. D. Clark
  • , S. Consiglio
  • , C. S. Wajd
  • , G. Nakamur
  • , G. J. Leusink

New Jersey Institute of Technology

Research output: Contribution to journal › Article › peer-review

22   Link opens in a new tab Scopus citations

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