Dedicated finite elements for electrode thin films on quartz resonators

Sonal A. Srivastava, Yook Kong Yong, Masako Tanaka, Tsutomu Imai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The finite element meshes of thickness shear piezoelectric resonators must be sufficiently fine so that the mesh impedance (stiffness) itself does not interfere with the acoustic wave propagation. Since the thickness of thin electrode film is usually much less than the resonator plate itself, the mesh for the electrodes are usually not optimal, and would usually have poor aspect ratios, that is the element length or width is more than two times larger than the element thickness. Special elements for the thin electrode film are proposed, and their results are compared with accurate numerical results. Finite elements models are used to demonstrate the effects of electrode boundary conditions and thickness of electrodes on the frequency temperature curves of an AT cut plate. Results are also shown to demonstrate the efficiency of reducing the electrode to the interface of the crystal and electrode using acceptable approximations such as Guyan reduction and merging.

Original languageEnglish (US)
Title of host publicationProceedings - 2004 IEEE Ultrasonics Symposium
Subtitle of host publicationA Conference of the IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Society, UFFC-S
EditorsM.P. Yuhas
Pages274-277
Number of pages4
DOIs
StatePublished - 2004
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: Aug 23 2004Aug 27 2004

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1

Other

Other2004 IEEE Ultrasonics Symposium
Country/TerritoryCanada
CityMontreal, Que.
Period8/23/048/27/04

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Keywords

  • Electrode interface conditions
  • Finite elements
  • Frequency-temperature behavior. AT-cut quartz resonators
  • Mesh reduction for thin electrode films

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