TY - GEN
T1 - Dedicated finite elements for electrode thin films on quartz resonators
AU - Srivastava, Sonal A.
AU - Yong, Yook Kong
AU - Tanaka, Masako
AU - Imai, Tsutomu
PY - 2004
Y1 - 2004
N2 - The finite element meshes of thickness shear piezoelectric resonators must be sufficiently fine so that the mesh impedance (stiffness) itself does not interfere with the acoustic wave propagation. Since the thickness of thin electrode film is usually much less than the resonator plate itself, the mesh for the electrodes are usually not optimal, and would usually have poor aspect ratios, that is the element length or width is more than two times larger than the element thickness. Special elements for the thin electrode film are proposed, and their results are compared with accurate numerical results. Finite elements models are used to demonstrate the effects of electrode boundary conditions and thickness of electrodes on the frequency temperature curves of an AT cut plate. Results are also shown to demonstrate the efficiency of reducing the electrode to the interface of the crystal and electrode using acceptable approximations such as Guyan reduction and merging.
AB - The finite element meshes of thickness shear piezoelectric resonators must be sufficiently fine so that the mesh impedance (stiffness) itself does not interfere with the acoustic wave propagation. Since the thickness of thin electrode film is usually much less than the resonator plate itself, the mesh for the electrodes are usually not optimal, and would usually have poor aspect ratios, that is the element length or width is more than two times larger than the element thickness. Special elements for the thin electrode film are proposed, and their results are compared with accurate numerical results. Finite elements models are used to demonstrate the effects of electrode boundary conditions and thickness of electrodes on the frequency temperature curves of an AT cut plate. Results are also shown to demonstrate the efficiency of reducing the electrode to the interface of the crystal and electrode using acceptable approximations such as Guyan reduction and merging.
KW - Electrode interface conditions
KW - Finite elements
KW - Frequency-temperature behavior. AT-cut quartz resonators
KW - Mesh reduction for thin electrode films
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U2 - https://doi.org/10.1109/ULTSYM.2004.1417719
DO - https://doi.org/10.1109/ULTSYM.2004.1417719
M3 - Conference contribution
SN - 0780384121
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 274
EP - 277
BT - Proceedings - 2004 IEEE Ultrasonics Symposium
A2 - Yuhas, M.P.
T2 - 2004 IEEE Ultrasonics Symposium
Y2 - 23 August 2004 through 27 August 2004
ER -