DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.

H. Baumgart, G. K. Celler, D. J. Lischner, McD Robinson, T. T. Sheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsJaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages349-354
Number of pages6
StatePublished - 1983
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume13

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Materials Science(all)

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