DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.

H. Baumgart; G. K. Celler; D. J. Lischner; McD Robinson; T. T. Sheng

DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.

H. Baumgart
, G. K. Celler
, D. J. Lischner
, McD Robinson
, T. T. Sheng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	American English
Title of host publication	Materials Research Society Symposia Proceedings
Editors	Jaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages	349-354
Number of pages	6
State	Published - 1983
Externally published	Yes

Publication series

Name	Materials Research Society Symposia Proceedings
Volume	13

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@inproceedings{158288ce664c49ada76c0e7ec085c341,

title = "DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.",

author = "H. Baumgart and Celler, \{G. K.\} and Lischner, \{D. J.\} and McD Robinson and Sheng, \{T. T.\}",

year = "1983",

language = "American English",

isbn = "0444007881",

series = "Materials Research Society Symposia Proceedings",

pages = "349--354",

editor = "Jaydish Narayan and Brown, \{Walter Lyons\} and Lemons, \{Ross A.\}",

booktitle = "Materials Research Society Symposia Proceedings",

}

DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING. / Baumgart, H.; Celler, G. K.; Lischner, D. J. et al.
Materials Research Society Symposia Proceedings. ed. / Jaydish Narayan; Walter Lyons Brown; Ross A. Lemons. 1983. p. 349-354 (Materials Research Society Symposia Proceedings; Vol. 13).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.

AU - Baumgart, H.

AU - Celler, G. K.

AU - Lischner, D. J.

AU - Robinson, McD

AU - Sheng, T. T.

PY - 1983

Y1 - 1983

UR - https://www.scopus.com/pages/publications/0020931885

UR - https://www.scopus.com/pages/publications/0020931885#tab=citedBy

M3 - Conference contribution

SN - 0444007881

T3 - Materials Research Society Symposia Proceedings

SP - 349

EP - 354

BT - Materials Research Society Symposia Proceedings

A2 - Narayan, Jaydish

A2 - Brown, Walter Lyons

A2 - Lemons, Ross A.

ER -

DEFECT CONTROL DURING EPITAXIAL REGROWTH BY RAPID THERMAL ANNEALING.

Publication series

ASJC Scopus subject areas

Other files and links

Cite this