Determination of lattice coherency by X-ray synergetic techniques in InGaPAs/InP heterostructures

Jongwon Lee, Thomas Tsakalakos

Research output: Contribution to journalArticlepeer-review


InGaPAs/InP heterostructures grown by organometallic vapor phase epitaxy (OMVPE) were systematically examined. The coherency state of the interface was assessed by comparison of normal and parallel lattice parameters and by X-ray topography. Based on these results, the metastable limit of critical thickness was computed. Dependence of X-ray full-width at half maximum (FWHM) on the lattice mismatch and on the tetragonality of the epilayer was observed. These results demonstrate that the coherency state of the hetero-interface is of primary importance in influencing the crystal quality of the InGaPAs active layer.

Original languageEnglish (US)
Pages (from-to)L5-L8
JournalMaterials Science and Engineering B
Issue number4
StatePublished - Apr 30 1992

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Materials Science(all)


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