TY - GEN
T1 - Experimental and numerical study of conjugate heat transfer in a horizontal channel heated from below
T2 - Heat Transfer Division - 1999 ((The ASME International Mechanical Engineering Congress and Exposition)
AU - Chiu, Wilson K.S.
AU - Richards, Cristy J.
AU - Jaluria, Yogesh
PY - 1999
Y1 - 1999
N2 - A detailed experimental and numerical study is carried out to investigate conjugate heat transfer in a horizontal channel with a heated section which simulates Chemical Vapor Deposition (CVD) processing. Since film quality, uniformity and deposition rate have strong dependence on temperature, the role of conjugate heat transfer in influencing temperature distribution is significant in thin film production. Experimental data obtained from this study provides physical insight into conjugate heat transfer effects and allows for comparison and validation of numerical conjugate heat transfer models. The basic characteristics of the flow and the thermal transport are studied. The numerical model is used to perform a parametric study of operational parameters, allowing for the characterization of conjugate heat transfer effects on temperature at the susceptor surface, reactor walls and the gas phase. The study yields valuable guidelines for the thermal design of CVD reactors.
AB - A detailed experimental and numerical study is carried out to investigate conjugate heat transfer in a horizontal channel with a heated section which simulates Chemical Vapor Deposition (CVD) processing. Since film quality, uniformity and deposition rate have strong dependence on temperature, the role of conjugate heat transfer in influencing temperature distribution is significant in thin film production. Experimental data obtained from this study provides physical insight into conjugate heat transfer effects and allows for comparison and validation of numerical conjugate heat transfer models. The basic characteristics of the flow and the thermal transport are studied. The numerical model is used to perform a parametric study of operational parameters, allowing for the characterization of conjugate heat transfer effects on temperature at the susceptor surface, reactor walls and the gas phase. The study yields valuable guidelines for the thermal design of CVD reactors.
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M3 - Conference contribution
SN - 0791816567
T3 - American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
SP - 131
EP - 142
BT - American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
PB - ASME
Y2 - 14 November 1999 through 19 November 1999
ER -