Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin; Stephen Y. Chou

doi:10.1063/1.1526457

Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin
, Stephen Y. Chou

Princeton University

Research output: Contribution to journal › Article › peer-review

223 Scopus citations

Abstract

Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 10⁴. The results showed that OTFT no longer saturate due to space charge limiting current effects.

Original language	American English
Pages (from-to)	4431-4433
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	23
DOIs	https://doi.org/10.1063/1.1526457
State	Published - Dec 2 2002

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1526457

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title = "Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography",

abstract = "Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.",

author = "Austin, \{Michael D.\} and Chou, \{Stephen Y.\}",

year = "2002",

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doi = "10.1063/1.1526457",

language = "American English",

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journal = "Applied Physics Letters",

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T1 - Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

AU - Austin, Michael D.

AU - Chou, Stephen Y.

PY - 2002/12/2

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N2 - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

AB - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

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UR - https://www.scopus.com/pages/publications/0037011629#tab=citedBy

U2 - 10.1063/1.1526457

DO - 10.1063/1.1526457

M3 - Article

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VL - 81

SP - 4431

EP - 4433

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -

Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Abstract

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