@article{40fc453882f44823a840d7a6a6639c1b,
title = "Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprint lithography",
author = "Zhaoning Yu and Lei Chen and Wei Wu and Haixiong Ge and Chou, \{Stephen Y.\}",
year = "2003",
doi = "10.1116/1.1609471",
language = "American English",
volume = "21",
pages = "2089--2092",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "American Institute of Physics",
number = "5",
}