We have studied the effect of deposition parameters on the microstructure, crystallinity, and ferroelectric properties of 0.88(Bi 0.5Na 0.5)TiO 3-0.08(Bi 0.5K 0.5)TiO 3-0.04BaTiO 3 thin films grown on SrRuO 3-coated SrTiO 3 substrates by pulsed laser deposition. The parameters studied were the repetition rates, substrate temperatures, oxygen pressures, and laser energies. It was realized that the films prepared at 800°C, 10 Hz, 400 mtorr, and 1.2 Jcm -2 exhibited the highest ferroelectric properties. The measured remanent polarization, dielectric constant at 1 kHz, and coercive field for this film were about 30 μCcm -2, 645, and 85 kVcm -1, respectively. Increasing the oxygen pressure during deposition from 200 to 400 mtorr improved the crystallinity, microstructure, dielectric constant, and polarization of the films. The leakage current and dielectric loss were suppressed at 400 mtorr because of the lower concentration of oxygen vacancies and disappearing pinholes and surface undulations in the film deposited at this pressure.
|Original language||English (US)|
|Number of pages||9|
|Journal||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|State||Published - 2012|
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering