Model-less inversion-based iterative control for output tracking: Piezo actuator example

Kyong Soo Kim, Qingze Zou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

45 Scopus citations

Abstract

In this article, we propose a model-less inversionbased iterative control (MIIC) approach for high-speed output tracking in repetitive applications such as the lateral scanning during atomic force microscope (AFM) imaging. The MIIC algorithm extends the inversion-based iterative control (IIC) technique and the enhanced inversion-based iterative control (EIIC) technique. The main contribution of this article is the development of the MIIC algorithm to eliminate the modeling process while further enhancing the output tracking performance. We explicitly consider the disturbance and/or measurement noise effect in the convergence analysis of the MIIC algorithm. It is shown that convergence can be reached in one iteration step if the noise/disturbance effect is negligible; Or, the input error can be quantified by the disturbance/noise to signal ratio (NSR, relative to the desired trajectory). The MIIC is applied to a piezo scanner on an atomic force microscope, and experimental results are presented to demonstrate the efficacy of the MIIC technique.

Original languageEnglish (US)
Title of host publication2008 American Control Conference, ACC
Pages2710-2715
Number of pages6
DOIs
StatePublished - 2008
Externally publishedYes
Event2008 American Control Conference, ACC - Seattle, WA, United States
Duration: Jun 11 2008Jun 13 2008

Publication series

NameProceedings of the American Control Conference

Other

Other2008 American Control Conference, ACC
Country/TerritoryUnited States
CitySeattle, WA
Period6/11/086/13/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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