Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

Mengchu Zhou, Mu Der Jeng

Research output: Contribution to journalArticle

263 Citations (Scopus)

Abstract

This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the complex semiconductor manufacturing processes and test procedures. A formal approach such as Petri nets enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them. This paper also serves as a tutorial paper. It briefly reviews applications of Petri nets in semiconductor manufacturing automation. It then introduces definitions and concepts of Petri nets. It proceeds with a discussion of basic Petri net modules in system modeling, a modeling method and a practical system's modeling example. Next, the paper presents their properties and their implications in manufacturing systems, as well as their analysis methods. Timed Petri nets are introduced for system simulation, performance evaluation, and scheduling purposes. An application-oriented case study is presented. Finally, the paper concludes with the active research areas in applying Petri nets to design of semiconductor manufacturing systems.

Original languageEnglish (US)
Pages (from-to)333-357
Number of pages25
JournalIEEE Transactions on Semiconductor Manufacturing
Volume11
Issue number3
DOIs
StatePublished - Dec 1 1998

Fingerprint

Petri nets
scheduling
manufacturing
Scheduling
Semiconductor materials
simulation
Discrete event simulation
systems simulation
qualitative analysis
automation
quantitative analysis
Automation
modules
evaluation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Keywords

  • Automation
  • Discrete event systems
  • Performance evaluation
  • Petri nets
  • Qualitative analysis
  • Quantitative analysis
  • Reduction
  • Scheduling
  • Semiconductor manufacturing
  • System modeling and simulation

Cite this

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title = "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach",
abstract = "This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems. These systems can be characterized as discrete event systems that exhibit sequential, concurrent, and conflicting relations among the events and operations. Their evolution is dynamic over time. The system complexity is tremendous owing to the complex semiconductor manufacturing processes and test procedures. A formal approach such as Petri nets enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them. This paper also serves as a tutorial paper. It briefly reviews applications of Petri nets in semiconductor manufacturing automation. It then introduces definitions and concepts of Petri nets. It proceeds with a discussion of basic Petri net modules in system modeling, a modeling method and a practical system's modeling example. Next, the paper presents their properties and their implications in manufacturing systems, as well as their analysis methods. Timed Petri nets are introduced for system simulation, performance evaluation, and scheduling purposes. An application-oriented case study is presented. Finally, the paper concludes with the active research areas in applying Petri nets to design of semiconductor manufacturing systems.",
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