Modification of silicon properties with lasers, electron beams, and incoherent light

George K. Celler

Research output: Contribution to journalArticlepeer-review

11 Scopus citations
Original languageAmerican English
Pages (from-to)193-265
Number of pages73
JournalCritical Reviews in Solid State and Materials Sciences
Volume12
Issue number3
DOIs
StatePublished - Jan 1984
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Chemical Engineering
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

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