TY - GEN
T1 - Nanomechanical properties of strained silicon-on-insulator (SOT) films epitaxially grown on Si1-xGex and layer transferred by wafer bonding
AU - Miller, Nathanael
AU - Tapily, Kandabara
AU - Baumgart, Helmut
AU - Celler, George K.
AU - Brunier, Francois
AU - Elmustafa, A. A.
PY - 2007
Y1 - 2007
N2 - Using nanoindentation, we report on the elasto-mechanical properties of multiple thin films of strained Silicon-on-Insulator (sSOl) and extreme strained Silicon-onInsulator (xsSOI). We measured the hardness and elastic moduli of the films. Both the hardness and elastic moduli were determined for the surface layers of SOT, 5i02, and the bulk silicon using the continuous stiffness method (CSM) XP Nano Instruments Nanoindentation tester. The measured hardness values for bi-axially tensile strained sSOI films and relaxed SOT films are found to be 9.23 GPa and 9.36 GPa respectively. The moduli are 101.2 GPa and 105.6 GPa respectively. Since these values are different from the bulk Si values of 12.5 GPa and 160.0 GPa for hardness and modulus, further investigation of the elastic properties of the nanolayers composite will be performed including simulation.
AB - Using nanoindentation, we report on the elasto-mechanical properties of multiple thin films of strained Silicon-on-Insulator (sSOl) and extreme strained Silicon-onInsulator (xsSOI). We measured the hardness and elastic moduli of the films. Both the hardness and elastic moduli were determined for the surface layers of SOT, 5i02, and the bulk silicon using the continuous stiffness method (CSM) XP Nano Instruments Nanoindentation tester. The measured hardness values for bi-axially tensile strained sSOI films and relaxed SOT films are found to be 9.23 GPa and 9.36 GPa respectively. The moduli are 101.2 GPa and 105.6 GPa respectively. Since these values are different from the bulk Si values of 12.5 GPa and 160.0 GPa for hardness and modulus, further investigation of the elastic properties of the nanolayers composite will be performed including simulation.
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M3 - Conference contribution
SN - 9781605604299
T3 - Materials Research Society Symposium Proceedings
SP - 95
EP - 101
BT - Materials Research Society Symposium Proceedings - Surface and Interfacial Nanomechanics
T2 - Surface and Interfacial Nanomechanics - 2007 MRS Spring Meeting
Y2 - 9 April 2007 through 13 April 2007
ER -