Nanomechanical properties of strained silicon-on-insulator (SOT) films epitaxially grown on Si1-xGex and layer transferred by wafer bonding

Nathanael Miller, Kandabara Tapily, Helmut Baumgart, George K. Celler, Francois Brunier, A. A. Elmustafa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

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Material Science