New insights into shape memory alloy bimorph actuators formed by electron beam evaporation

Hao Sun, Jianjun Luo, Ming Lu, Dmytro Nykypanchuk, Yong Shi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In order to create shape memory alloy (SMA) bimorph microactuators with high-precision features, a novel fabrication process combined with electron beam (E-beam) evaporation, lift-off resist and isotropic XeF2 dry etching method was developed. To examine the effect of E-beam deposition and annealing process on nitinol (NiTi) characteristics, the NiTi thin film samples with different deposition rate and overflow conditions during annealing process were investigated. With the characterizations using scanning electron microscope and x-ray diffraction, the results indicated that low E-beam deposition rate and argon employed annealing process could benefit the formation of NiTi crystalline structure. Besides, SMA bimorph microactuators with high-precision features as small as 5 microns were successfully fabricated. Furthermore, the thermomechanical performance was experimentally verified and compared with finite element analysis simulation results.

Original languageEnglish
Title of host publication23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791851791
DOIs
StatePublished - 2018
EventASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018 - Quebec City, Canada
Duration: Aug 26 2018Aug 29 2018

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Conference

ConferenceASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018
Country/TerritoryCanada
CityQuebec City
Period8/26/188/29/18

ASJC Scopus subject areas

  • Mechanical Engineering
  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Modeling and Simulation

Keywords

  • Annealing
  • Bimorph
  • Electron beam evaporation
  • Lift-off resist
  • Microactuators
  • Microfabrication
  • NiTi
  • Shape memory alloy
  • X-ray diffraction
  • XeF2 dry etching

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