Optimal scheduling analysis of treelike hybrid multi-cluster tools

Fajun Yang, Naiqi Wu, Yan Qiao, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A hybrid multi-cluster tool is composed of both dual and single-arm robotic tools. Since their behavior is different, it is very challenging to coordinate their activities in such a tool and to schedule it optimally. This work aims at finding such a schedule for a treelike hybrid multi-cluster tool whose bottleneck tool is assumed to be process-bound. Resource-oriented Petri nets are extended to model the system. With the model, this work shows the conditions under which there is a one-wafer cyclic schedule such that the least cycle time can be obtained. An efficient algorithm is proposed then to test the existence of such a schedule and find it if existing. Example is given to illustrate the derived approaches.

Original languageEnglish (US)
Title of host publication2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
PublisherIEEE Computer Society
Pages1400-1404
Number of pages5
ISBN (Electronic)9781509024094
DOIs
StatePublished - Nov 14 2016
Event2016 IEEE International Conference on Automation Science and Engineering, CASE 2016 - Fort Worth, United States
Duration: Aug 21 2016Aug 24 2016

Publication series

NameIEEE International Conference on Automation Science and Engineering
Volume2016-November

Other

Other2016 IEEE International Conference on Automation Science and Engineering, CASE 2016
Country/TerritoryUnited States
CityFort Worth
Period8/21/168/24/16

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Fingerprint

Dive into the research topics of 'Optimal scheduling analysis of treelike hybrid multi-cluster tools'. Together they form a unique fingerprint.

Cite this