Optimal scheduling of κ-unit production of cluster tools with single-blade robots

Wai Kin Victor Chan, Jingang Yi, Shengwei Ding, Dezhen Song

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions.

Original languageEnglish (US)
Title of host publication4th IEEE Conference on Automation Science and Engineering, CASE 2008
Pages335-340
Number of pages6
DOIs
StatePublished - 2008
Externally publishedYes
Event4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States
Duration: Aug 23 2008Aug 26 2008

Publication series

Name4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other4th IEEE Conference on Automation Science and Engineering, CASE 2008
Country/TerritoryUnited States
CityWashington, DC
Period8/23/088/26/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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