Optimal scheduling of κ-unit production of cluster tools with single-blade robots

Wai Kin Victor Chan; Jingang Yi; Shengwei Ding; Dezhen Song

doi:https://doi.org/10.1109/COASE.2008.4626439

Optimal scheduling of κ-unit production of cluster tools with single-blade robots

Wai Kin Victor Chan, Jingang Yi, Shengwei Ding, Dezhen Song

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

16 Scopus citations

Abstract

The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions.

Original language	English (US)
Title of host publication	4th IEEE Conference on Automation Science and Engineering, CASE 2008
Pages	335-340
Number of pages	6
DOIs	https://doi.org/10.1109/COASE.2008.4626439
State	Published - 2008
Externally published	Yes
Event	4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States Duration: Aug 23 2008 → Aug 26 2008

Publication series

Name	4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other	4th IEEE Conference on Automation Science and Engineering, CASE 2008
Country/Territory	United States
City	Washington, DC
Period	8/23/08 → 8/26/08

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

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https://doi.org/10.1109/COASE.2008.4626439

Cite this

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title = "Optimal scheduling of κ-unit production of cluster tools with single-blade robots",

abstract = "The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions.",

author = "{Victor Chan}, {Wai Kin} and Jingang Yi and Shengwei Ding and Dezhen Song",

year = "2008",

doi = "https://doi.org/10.1109/COASE.2008.4626439",

language = "English (US)",

isbn = "9781424420230",

series = "4th IEEE Conference on Automation Science and Engineering, CASE 2008",

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note = "4th IEEE Conference on Automation Science and Engineering, CASE 2008 ; Conference date: 23-08-2008 Through 26-08-2008",

}

Victor Chan, WK, Yi, J, Ding, S & Song, D 2008, Optimal scheduling of κ-unit production of cluster tools with single-blade robots. in 4th IEEE Conference on Automation Science and Engineering, CASE 2008., 4626439, 4th IEEE Conference on Automation Science and Engineering, CASE 2008, pp. 335-340, 4th IEEE Conference on Automation Science and Engineering, CASE 2008, Washington, DC, United States, 8/23/08. https://doi.org/10.1109/COASE.2008.4626439

Optimal scheduling of κ-unit production of cluster tools with single-blade robots. / Victor Chan, Wai Kin; Yi, Jingang; Ding, Shengwei; Song, Dezhen.

4th IEEE Conference on Automation Science and Engineering, CASE 2008. 2008. p. 335-340 4626439 (4th IEEE Conference on Automation Science and Engineering, CASE 2008).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions.

AB - The main challenge in scheduling multi-cluster tools in semiconductor manufacturing is the interactions among clusters. These interactions create a κ-unit optimal production that do not exist in single-cluster tools. This paper analyzes optimal scheduling of κ-unit cycle production of multi-cluster tools with single-blade robots. A resource-based method is used to analytically derive closed-form expressions for the minimal cycle time of a multi-cluster tool. Conditions for decoupling multi-cluster tools and optimality conditions for the widely used pull schedule are also presented. An example from industry production is used to illustrate the derived formula and decoupling conditions.

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BT - 4th IEEE Conference on Automation Science and Engineering, CASE 2008

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Y2 - 23 August 2008 through 26 August 2008

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Optimal scheduling of κ-unit production of cluster tools with single-blade robots

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