Abstract
The state variables of the dynamics of heat transfer in a rapid thermal processing system can be efficiently represented by the coefficients of a Bessel function expansion of the temperature distribution in a circular wafer. An algorithm developed in 1993 by Friedland is investigated for estimating parameters in the differential equations for the Bessel coefficients. Simulation results, which show excellent performance, are supported by favorable experimental results obtained in an actual RTP chamber.
| Original language | American English |
|---|---|
| Pages (from-to) | 7-11 |
| Number of pages | 5 |
| Journal | Proceedings of the American Control Conference |
| Volume | 1 |
| State | Published - 1995 |
| Event | Proceedings of the 1995 American Control Conference. Part 1 (of 6) - Seattle, WA, USA Duration: Jun 21 1995 → Jun 23 1995 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering