Patterning conductive copper by nanotransfer printing

Kimberly Felmet, Yueh Lin Loo, Yangming Sun

Research output: Contribution to journalArticle

54 Scopus citations

Abstract

We describe a method for patterning conductive copper over large areas by nanotransfer printing (nTP). This technique is purely additive and yields feature sizes in the 1-500 μm range. Unlike gold patterns printed in a similar manner, oligomers from poly(dimethylsiloxane) (PDMS) stamps used in nTP permeate through the entire thickness of printed copper resulting in nonconductive patterns. Hot leaching the PDMS stamps in toluene prior to printing removes residual oligomers; printing with pretreated stamps reproducibly yields conductive copper patterns with an average resistivity of 31 μΩ-cm.

Original languageEnglish (US)
Pages (from-to)3316-3318
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number15
DOIs
StatePublished - Oct 11 2004
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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