Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing

Qing Hua Zhu, Nai Qi Wu, Yan Qiao, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

66 Scopus citations

Abstract

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus, it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic scheduling for multi-cluster tools whose bottleneck cluster tool is process-bound. The system is modeled by a Petri net. With this model, conditions under which a one-wafer cyclic schedule exists are developed. Based on them, it is shown that, for any multi-cluster tool whose bottleneck cluster tool is process-bound, there is always a one-wafer cyclic schedule. Then, a method is presented to find the minimal cycle time and the optimal one-wafer cyclic schedule. It is computationally efficient. Illustrative examples are used to show the applications and effectiveness of the proposed method.

Original languageEnglish (US)
Article number6579732
Pages (from-to)578-591
Number of pages14
JournalIEEE Transactions on Semiconductor Manufacturing
Volume26
Issue number4
DOIs
StatePublished - Jan 1 2013

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Keywords

  • Cluster tool
  • Petri net
  • Scheduling
  • Semiconductor manufacturing

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