In this article, we indicate the status of our current understanding of semiconductor surface geometries. We review the various experimental and theoretical structure determination techniques which have been developed and evaluate their performance on semiconductor surfaces. We survey the atomic geometries of non-polar and polar surfaces of compound semiconductors and specify the current state of understanding of Si surfaces. Finally we indicate the atomic geometries of semiconductor interfaces.

Original languageAmerican English
Pages (from-to)193-300
Number of pages108
JournalSurface Science Reports
Issue number4-5
StatePublished - 1983

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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