SINGLE CHAMBER AMORPHOUS SILICON MANUFACTURING PROCESS.

A. E. Delahoy, F. B. Ellis, E. Eser, S. Gau, H. Voiltrauer, Z. Kiss

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Manufacturing steps necessary for production of sub-modules consisting of monolithically interconnected cells on a glass substrate are summarized. Flow line and batch processing are defined. It is shown that batch single chamber deposition of hydrogenated amorphous silicon layers, when properly designed, is comparable to batch multichamber deposition of said layers in producing sharp interfaces, low cross-contamination, and high efficiency photovoltaic cells.

Original languageEnglish (US)
Title of host publicationCommission of the European Communities, (Report) EUR
EditorsWolfgang Palz, F.C. Trebble
PublisherD. Reidel Publ Co
Pages670-676
Number of pages7
ISBN (Print)9027721041
StatePublished - Dec 1 1985

Publication series

NameCommission of the European Communities, (Report) EUR

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Delahoy, A. E., Ellis, F. B., Eser, E., Gau, S., Voiltrauer, H., & Kiss, Z. (1985). SINGLE CHAMBER AMORPHOUS SILICON MANUFACTURING PROCESS. In W. Palz, & F. C. Trebble (Eds.), Commission of the European Communities, (Report) EUR (pp. 670-676). (Commission of the European Communities, (Report) EUR). D. Reidel Publ Co.