Single-step fabrication of silicon-cone arrays

Gerard Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle

Research output: Contribution to journalArticlepeer-review

62 Scopus citations


The fabrication of silicon cones on a (100) silicon wafer was reported. The silica microspheres on a quartz support is used as a microlens system for laser-induced single-step fabrication of arrays of silicon cones. The silicone-cone arrays were fabricated with single-pulse 258 nm KrF laser radiation. It was observed that the volume of silicon increases during solidification.

Original languageAmerican English
Pages (from-to)692-693
Number of pages2
JournalApplied Physics Letters
Issue number5
StatePublished - Feb 3 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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