Structural and dielectric characterization of SrTiO3 and BST thin films for microwave applications

J. Bellotti, E. K. Akdogan, A. Safari

Research output: Contribution to conferencePaperpeer-review

1 Scopus citations

Abstract

Heteroepitaxial SrTiO3 and polycrystalline Ba(1-x)SrxTiO3 (x = 0.35, 0.40, 0.50) thin films (∼300 nm) were deposited on (100) oriented LaAlO3 single crystal substrates by pulsed laser deposition using a KrF excimer laser (λ = 248 nm). RBS, XRD, FESEM, and AFM were used for structural characterization. The stoichiometry was found to be closest to ideal at higher temperatures around 750°C. The SrTiO3 films were confirmed to be epitaxial with XRD omega scans, while the BST films were polycrystalline. The permittivity and loss tangent of the films were measured in the range of 1kHz to 1MHz. Both materials showed a high dielectric constant, 230 for ST and around 800 for BST at room temperature, with losses on the order of a few percent. The tunability of BST was also measured and found to be up to 35%, depending on composition. In addition, correlations between film morphology, processing conditions, and stoichiometry will be discussed.

Original languageEnglish (US)
Pages867-870
Number of pages4
StatePublished - 2000
Event12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States
Duration: Jul 21 2000Aug 2 2000

Other

Other12th IEEE International Symposium on Applications of Ferroelectrics
Country/TerritoryUnited States
CityHonolulu, HI
Period7/21/008/2/00

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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