Study and preparation of high Tc superconducting (HTSC) thin films for electronic applications

Siu Wai Chan, R. R. Krchnavek, C. T. Rogers, S. J. Allen, M. Biazzo, E. W. Chase, T. L. Cheeks, F. DeRosa, D. M. Hwang, P. F. Miceli, S. M. Sampere, B. J. Wilkens

Research output: Contribution to journalConference articlepeer-review


High-quality superconducting YBa2Cu3O7-x thin films were reproducibly prepared by thermal coevaporation of BaF2, Y, and Cu. Uniformity in thickness and composition of the deposited films can be achieved for a 2.5-in-diameter area on the substrate holder. Four-probe resistivity, critical current measurements, and X-ray diffraction were used to characterize the films after a postdeposition annealing in a mixture of O2 and H2O. Highly c-oriented films with total transition temperature above 90 K were reproducibly fabricated on (001) SrTiO3 with a critical current of 4 × 104 A/cm2 at 77 K. The total transition temperatures of films fabricated on ZrO2, (001) YAG, (001) MgO, and (001) MgAl2O4 were 87 K, 74 K, 63 K, and 57 K, respectively. The effect of the postdeposition processing ambient on the preparation of the thin films was studied. The role of H2O vapor and of an HF getter (e.g., SiO2) during the high-temperature anneal is understood through a thermodynamic analysis of the fluorine-removal reaction. Photolithography and argon ion milling have been used to produce YBa2Cu3O7-x wires from several micrometers to submicrometer in size. The wires behaved as scaled-down bulk superconducting films rather than weak links.

Original languageEnglish (US)
Pages (from-to)13-22
Number of pages10
JournalProceedings - Electronic Components and Technology Conference
StatePublished - 1989
Externally publishedYes
Event39th Electronic Components - Houston, TX, USA
Duration: May 22 1989May 24 1989

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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