@inproceedings{bac9a6a0e47c466985e312cb456a4eaa,
title = "Subwavelength optical elements and nanoimprint technology for optical MEMS",
author = "Chou, {Stephen Y.}",
year = "2006",
month = dec,
day = "1",
language = "American English",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
pages = "3--4",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}