Surface treatment of polymers for the fabrication of all-polymer microfluidic devices

Jiheng Zhao, Debra A. Sheadel, Wei Xue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Polymer microfluidics has received considerable attention due to their low cost, remarkable biocompatibility, and high flexibility when compared to glass and silicon devices. However, the fabrication process of all-polymer devices can be complicated. In particular, different types of polymers possess different properties in terms of surface chemistry and hydrophilicity, making device assembly a challenging task. In this paper, we demonstrate the fabrication of an all-polymer device through the investigation of the essential surface treatment methods. A hybrid SU-8-SU-8-polydimethylsiloxane (PDMS) sandwiched structure is used in this research. Both untreated SU-8 and PDMS are hydrophobic and they have different surface chemistry properties, so surface modifications are necessary. Three critical surface treatment steps are used in our process. The first step is to treat the first SU-8 layer with low-power (10 W) oxygen plasma, making its surface hydrophilic. This step enables the uniform coating of the second SU-8 layer. The next surface treatment is on the second SU-8 layer. Both oxygen plasma (40 W) etching and diluted 3- aminopropyltriethoxysilane (APTES, a silane solution) coating are needed. APTES introduces amine (Si-NH2) groups on the surface. The last treatment step is to introduce silanol (Si-OH) groups on PDMS using oxygen plasma. These surface treatment steps are critical in the fabrication process and can determine the quality of the final device.

Original languageEnglish (US)
Title of host publicationASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Pages507-511
Number of pages5
Volume9
EditionPARTS A AND B
DOIs
StatePublished - Dec 1 2012
Externally publishedYes
EventASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 - Houston, TX, United States
Duration: Nov 9 2012Nov 15 2012

Other

OtherASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
CountryUnited States
CityHouston, TX
Period11/9/1211/15/12

Fingerprint

Microfluidics
Surface treatment
Fabrication
Polymers
Surface chemistry
Plasmas
Oxygen
Coatings
Hydrophilicity
Polydimethylsiloxane
Silanes
Biocompatibility
Etching
Amines
Glass
Silicon
Costs

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Zhao, J., Sheadel, D. A., & Xue, W. (2012). Surface treatment of polymers for the fabrication of all-polymer microfluidic devices. In ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 (PARTS A AND B ed., Vol. 9, pp. 507-511) https://doi.org/10.1115/IMECE2012-86136
Zhao, Jiheng ; Sheadel, Debra A. ; Xue, Wei. / Surface treatment of polymers for the fabrication of all-polymer microfluidic devices. ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. Vol. 9 PARTS A AND B. ed. 2012. pp. 507-511
@inproceedings{7ad0def327584bee932e38c077f96041,
title = "Surface treatment of polymers for the fabrication of all-polymer microfluidic devices",
abstract = "Polymer microfluidics has received considerable attention due to their low cost, remarkable biocompatibility, and high flexibility when compared to glass and silicon devices. However, the fabrication process of all-polymer devices can be complicated. In particular, different types of polymers possess different properties in terms of surface chemistry and hydrophilicity, making device assembly a challenging task. In this paper, we demonstrate the fabrication of an all-polymer device through the investigation of the essential surface treatment methods. A hybrid SU-8-SU-8-polydimethylsiloxane (PDMS) sandwiched structure is used in this research. Both untreated SU-8 and PDMS are hydrophobic and they have different surface chemistry properties, so surface modifications are necessary. Three critical surface treatment steps are used in our process. The first step is to treat the first SU-8 layer with low-power (10 W) oxygen plasma, making its surface hydrophilic. This step enables the uniform coating of the second SU-8 layer. The next surface treatment is on the second SU-8 layer. Both oxygen plasma (40 W) etching and diluted 3- aminopropyltriethoxysilane (APTES, a silane solution) coating are needed. APTES introduces amine (Si-NH2) groups on the surface. The last treatment step is to introduce silanol (Si-OH) groups on PDMS using oxygen plasma. These surface treatment steps are critical in the fabrication process and can determine the quality of the final device.",
author = "Jiheng Zhao and Sheadel, {Debra A.} and Wei Xue",
year = "2012",
month = "12",
day = "1",
doi = "https://doi.org/10.1115/IMECE2012-86136",
language = "English (US)",
isbn = "9780791845257",
volume = "9",
pages = "507--511",
booktitle = "ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012",
edition = "PARTS A AND B",

}

Zhao, J, Sheadel, DA & Xue, W 2012, Surface treatment of polymers for the fabrication of all-polymer microfluidic devices. in ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B edn, vol. 9, pp. 507-511, ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012, Houston, TX, United States, 11/9/12. https://doi.org/10.1115/IMECE2012-86136

Surface treatment of polymers for the fabrication of all-polymer microfluidic devices. / Zhao, Jiheng; Sheadel, Debra A.; Xue, Wei.

ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. Vol. 9 PARTS A AND B. ed. 2012. p. 507-511.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Surface treatment of polymers for the fabrication of all-polymer microfluidic devices

AU - Zhao, Jiheng

AU - Sheadel, Debra A.

AU - Xue, Wei

PY - 2012/12/1

Y1 - 2012/12/1

N2 - Polymer microfluidics has received considerable attention due to their low cost, remarkable biocompatibility, and high flexibility when compared to glass and silicon devices. However, the fabrication process of all-polymer devices can be complicated. In particular, different types of polymers possess different properties in terms of surface chemistry and hydrophilicity, making device assembly a challenging task. In this paper, we demonstrate the fabrication of an all-polymer device through the investigation of the essential surface treatment methods. A hybrid SU-8-SU-8-polydimethylsiloxane (PDMS) sandwiched structure is used in this research. Both untreated SU-8 and PDMS are hydrophobic and they have different surface chemistry properties, so surface modifications are necessary. Three critical surface treatment steps are used in our process. The first step is to treat the first SU-8 layer with low-power (10 W) oxygen plasma, making its surface hydrophilic. This step enables the uniform coating of the second SU-8 layer. The next surface treatment is on the second SU-8 layer. Both oxygen plasma (40 W) etching and diluted 3- aminopropyltriethoxysilane (APTES, a silane solution) coating are needed. APTES introduces amine (Si-NH2) groups on the surface. The last treatment step is to introduce silanol (Si-OH) groups on PDMS using oxygen plasma. These surface treatment steps are critical in the fabrication process and can determine the quality of the final device.

AB - Polymer microfluidics has received considerable attention due to their low cost, remarkable biocompatibility, and high flexibility when compared to glass and silicon devices. However, the fabrication process of all-polymer devices can be complicated. In particular, different types of polymers possess different properties in terms of surface chemistry and hydrophilicity, making device assembly a challenging task. In this paper, we demonstrate the fabrication of an all-polymer device through the investigation of the essential surface treatment methods. A hybrid SU-8-SU-8-polydimethylsiloxane (PDMS) sandwiched structure is used in this research. Both untreated SU-8 and PDMS are hydrophobic and they have different surface chemistry properties, so surface modifications are necessary. Three critical surface treatment steps are used in our process. The first step is to treat the first SU-8 layer with low-power (10 W) oxygen plasma, making its surface hydrophilic. This step enables the uniform coating of the second SU-8 layer. The next surface treatment is on the second SU-8 layer. Both oxygen plasma (40 W) etching and diluted 3- aminopropyltriethoxysilane (APTES, a silane solution) coating are needed. APTES introduces amine (Si-NH2) groups on the surface. The last treatment step is to introduce silanol (Si-OH) groups on PDMS using oxygen plasma. These surface treatment steps are critical in the fabrication process and can determine the quality of the final device.

UR - http://www.scopus.com/inward/record.url?scp=84887306429&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84887306429&partnerID=8YFLogxK

U2 - https://doi.org/10.1115/IMECE2012-86136

DO - https://doi.org/10.1115/IMECE2012-86136

M3 - Conference contribution

SN - 9780791845257

VL - 9

SP - 507

EP - 511

BT - ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012

ER -

Zhao J, Sheadel DA, Xue W. Surface treatment of polymers for the fabrication of all-polymer microfluidic devices. In ASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012. PARTS A AND B ed. Vol. 9. 2012. p. 507-511 https://doi.org/10.1115/IMECE2012-86136