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Two-dimensional simulation of compact ECR plasma sources
Han Ming Wu
,
David B. Graves
, Mike Kilgore
Research output
:
Contribution to journal
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Article
›
peer-review
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Keyphrases
Neutral Gas
100%
Plasma Sources
100%
Two-dimensional Simulation
100%
Electron Cyclotron Resonance Plasma
100%
Gas Pressure
66%
Ionization Rate
66%
Plasma Parameters
33%
Plasma Density
33%
Kinetic Energy
33%
Monte Carlo Method
33%
Reactor
33%
Neutral Density
33%
Velocity Distribution
33%
Gas Density
33%
Electron Fluid
33%
Electron Temperature
33%
Neutral Model
33%
2D Simulation
33%
Depletion Effect
33%
Gas Depletion
33%
Argon Plasma
33%
Plasma Potential
33%
Pressure Decrease
33%
Plasma Reactor
33%
Directed Motion
33%
Pair-ion Plasma
33%
Ion Kinetic Energy
33%
Potential Density
33%
Plasma Behavior
33%
Kinetic Velocity
33%
Random Energy
33%
Ion Kinetic Energy Distribution
33%
Physics
Electron Cyclotron Resonance
100%
Blood Plasma
100%
Kinetic Energy
75%
Neutral Gas
75%
Gas Pressure
50%
Electron Energy
25%
Argon Plasma
25%
Plasma Potential
25%
Neutral Particle
25%
Plasma Density
25%
Monte Carlo Method
25%